The influence of microelectronic processing steps on the properties of porous Si-layers

Münder, H.; Berger, M. G.; Frohnhoff, S.; Thönissen, M.; Lüth, H.; Theiss, W.; Küpper, L.

Boston, Mass (1993)
Contribution to a book

In: Optical properties of low dimensional silicon structures. Hrsg. D.C. Bensahel [u.a.]
Page(s)/Article-Nr.: 75