Structural and optical properties of thin zirconium oxide films prepared by reactive direct current magnetron sputtering

Melville, NY / IOP Publ. (2002) [Journal Article]

Journal of applied physics
Volume: 92
Issue: 7
Page(s): 3599-3607


Selected Authors

Venkataraj, S.
Kappertz, Oliver
Weis, Hansjörg
Drese, Robert Jens
Jayavel, R.

Other Authors

Wuttig, Matthias