Physical properties of thin GeO2 films produced by reactive DC magnetron sputtering
Lange, Thomas; Njoroge, Walter Kamande; Weis, Hansjörg; Beckers, Manfred; Wuttig, Matthias
Amsterdam : Elsevier [u.a.] (2000)
Journal Article
In: Thin solid films
Volume: 365
Issue: 1
Page(s)/Article-Nr.: 82-89
Identifier
- DOI: 10.1016/S0040-6090(99)01106-2
- RWTH PUBLICATIONS: RWTH-CONV-050663