BST thin films grown in a multiwafer MOCVD reactor

Fitsilis, Fotios; Regnery, S.; Ehrhart, Peter; Waser, Rainer; Schienle, F.; Schumacher, M.; Dauelsberg, M.; Strzyzewski, P.; Jürgensen, H.

Oxford [u.a.] : Elsevier (2001)
Journal Article

In: Journal of the European Ceramic Society
Volume: 21
Issue: 10
Page(s)/Article-Nr.: 1547-1551