Reactive direct current magnetron sputtering of tungsten oxide : a correlation between film properties and deposition pressure

Salinga, Christian Lothar; Kappertz, Oliver; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2006)
Journal Article

In: Thin solid films
Volume: 515
Issue: 4
Page(s)/Article-Nr.: 2760-2764

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]