In situ stress measurements inzirconium and zirconium oxide films prepared by direct-current sputtering

Drese, Robert Jens; Wuttig, Matthias

Melville, NY : AIP (2006)
Journal Article

In: Journal of applied physics
Volume: 99
Issue: 12
Page(s)/Article-Nr.: 123517


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Department of Physics [130000]