On the deposition rate in a high power pulsed magnetron sputtering discharge

Alami, Jones; Sarakinos, Kostas; Mark, G.; Wuttig, Matthias

Melville, N.Y : American Institute of Physics (2006)
Journal Article

In: Applied physics letters
Volume: 89
Issue: 15
Page(s)/Article-Nr.: 154104

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]