Stress evolution during growth in direct-current sputtered zinc oxide films at various flows

Drese, Robert Jens; Wuttig, Matthias

Melville, NY : American Institute of Physics, AIP (2005)
Journal Article

In: Journal of applied physics
Volume: 98
Issue: 7
Page(s)/Article-Nr.: 73514

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]