Influence of deposition parameters on the properties of sputtered Ge2Sb2Te5

Dieker, Henning; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2005)
Journal Article

In: Thin solid films
Volume: 478
Issue: 1/2
Page(s)/Article-Nr.: 248-248

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]