Characterization of niobium oxide films prepared by reactive DC magnetron sputtering

Venkataraj, S.; Drese, Robert Jens; Kappertz, Oliver; Jayavel, R.; Wuttig, Matthias

Berlin : Wiley-VCH (2001)
Journal Article

In: Physica status solidi / A
Volume: 188
Page(s)/Article-Nr.: 1047-1058