Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering

Ngaruiya, J. M.; Kappertz, O.; Liesch, C.; Müller, P.; Dronskowski, Richard; Wuttig, Matthias

Berlin : Wiley-VCH (2004)
Fachzeitschriftenartikel

In: Physica status solidi / A, Applications and materials science
Band: 201
Heft: 5
Seite(n)/Artikel-Nr.: 967-976