Stress evolution during growth in direct-current sputtered zinc oxide films at various flows
Drese, Robert Jens; Wuttig, Matthias
Melville, NY : American Institute of Physics, AIP (2005)
Fachzeitschriftenartikel
In: Journal of applied physics
Band: 98
Heft: 7
Seite(n)/Artikel-Nr.: 73514
Identifikationsnummern
- DOI: 10.1063/1.2061888
- RWTH PUBLICATIONS: RWTH-CONV-031268