Stress evolution during growth in direct-current sputtered zinc oxide films at various flows

Drese, Robert Jens; Wuttig, Matthias

Melville, NY : American Institute of Physics, AIP (2005)
Fachzeitschriftenartikel

In: Journal of applied physics
Band: 98
Heft: 7
Seite(n)/Artikel-Nr.: 73514