On the relationship between the peak target current and the morphology of chromium nitride thin films deposited by reactive high power pulsed magnetron sputtering

Alami, Jones; Sarakinos, Kostas; Uslu, Fahri; Wuttig, Matthias

Bristol : IOP Publ. (2009)
Fachzeitschriftenartikel

In: Journal of physics / D, Applied physics
Band: 42
Heft: 1
Seite(n)/Artikel-Nr.: 015304

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