Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering

Ngaruiya, J. M.; Kappertz, O.; Liesch, C.; Müller, P.; Dronskowski, Richard; Wuttig, Matthias

Berlin : Wiley-VCH (2004)
Journal Article

In: Physica status solidi / A, Applications and materials science
Volume: 201
Issue: 5
Page(s)/Article-Nr.: 967-976


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Chair of Solid-State and Quantum Chemistry [151110]
  • Department of Chemistry [150000]
  • Department of Physics [130000]