Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays

New York, NY / American Institute of Physics [u.a.] (2013) [Journal Article]

Journal of vacuum science & technology : JVST / B
Volume: 31
Issue: 2
Page(s): 021602


Selected Authors

Danylyuk, Serhiy
Kim, Hyun-su
Brose, Sascha
Dittberner, Carsten
Loosen, Peter

Other Authors

Taubner, Thomas
Bergmann, Klaus
Juschkin, Larissa