Thermal stability of sputtered zirconium oxide films
Kidlington / Elsevier Science (2004) [Journal Article]
Vacuum
Volume: 75
Issue: 1
Page(s): 7-16
Authors
Selected Authors
Venkataraj, S.
Kappertz, O.
Liesch, C.
Detemple, Ralf
Jayavel, R.
Other Authors
Wuttig, Matthias
Identifier
- DOI: 10.1016/j.vacuum.2003.12.127
- REPORT NUMBER: RWTH-CONV-071543