Composition and formation mechanism of zirconium oxynitride films produced by reactive direct current magnetron sputtering

Berlin / Wiley-VCH (2004) [Journal Article]

Physica status solidi / A, Applications and materials science
Volume: 201
Issue: 5
Page(s): 967-976


Selected Authors

Ngaruiya, J. M.
Kappertz, O.
Liesch, C.
Müller, P.
Dronskowski, Richard

Other Authors

Wuttig, Matthias