Influence of nitrogen content on properties of direct current sputtered TiOxNy films

Mohamed, S. H.; Kappertz, Oliver; Ngaruiya, J. M.; Niemeier, T.; Drese, Robert Jens; Detemple, Ralf; Wakkad, M. M.; Wuttig, Matthias

Berlin / Wiley-VCH (2004) [Journal Article]

Physica status solidi / A, Applications and materials science
Volume: 201
Issue: 1
Page(s): 90-102