Structure formation upon reactive direct current magnetron sputtering of transition metal oxide films

Ngaruiya, J. M.; Kappertz, O.; Mohamed, S. H.; Wuttig, Matthias

Melville, NY : AIP (2004)
Journal Article

In: Applied physics letters
Volume: 85
Issue: 5
Page(s)/Article-Nr.: 748-750


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Department of Physics [130000]