Effect of the target surface temperature on the distribution of nanoparticles formed by ion implantation

Stepanov, Andrey L.; Hole, D.; Popok, V. N.

Road Town, Tortola, British Virgin Islands : Pleiades Publ. (2001)
Journal Article

In: Technical physics letters
Volume: 27
Issue: 7
Page(s)/Article-Nr.: 554-556

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]