Thermal stability of amorphous molybdenum trioxide films prepared at different oxygen partial pressures by reactive DC magnetron sputtering
Mohamed, Sodky Hamed; Venkataraj, Selveraj
Kidlington : Elsevier Science (2007)
Journal Article
In: Vacuum
Volume: 81
Issue: 5
Page(s)/Article-Nr.: 636-643
Identifier
- DOI: 10.1016/j.vacuum.2006.08.006
- RWTH PUBLICATIONS: RWTH-CONV-066340