Growth of TiOX Films by High Power Pulsed Magnetron Sputtering from a Compound TiO1.8 Target

Sarakinos, K.; Alami, Jones; Klever, Christian; Wuttig, Matthias

St. Petersburg : Advanced Study Center (2007)
Contribution to a conference proceedings, Journal Article

In: Reviews on advanced materials science : RAMS
Volume: 15
Issue: 1
Page(s)/Article-Nr.: 44-48

Identifier