Effect of heat treatment on structural, optical and mechanical properties of sputtered TiOxNy films

Mohamed, S. H.; Kappertz, O.; Niemeier, T.; Drese, R.; Wakkad, M. M.; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2004)
Journal Article

In: Thin solid films
Volume: 468
Issue: 1/2
Page(s)/Article-Nr.: 48-56


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Department of Physics [130000]