The effect of the backscattered energetic atoms on the stress generation and the surface morphology of reactively sputtered vanadium nitride films

Sarakinos, Konstantinos; Alami, Jones; Severin, Daniel; Karimi, Patrick Mwangi; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2008)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 516
Issue: 14
Page(s)/Article-Nr.: 4568-4573