Reactive sputter deposition of zinc oxide : employing resputtering effects

Kappertz, Oliver; Drese, Robert Jens; Wuttig, Matthias; Ngaruiya, J. M.

Amsterdam [u.a.] : Elsevier (2005)
Journal Article

In: Thin solid films
Volume: 484
Issue: 1/2
Page(s)/Article-Nr.: 64-67

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]