Structural, optical and mechanical properties of aluminium nitride films prepared by reactive DC magnetron sputterin

Venkataraj, Selveraj; Severin, Daniel; Drese, Robert Jens; Koerfer, Friedel; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2006)
Contribution to a conference proceedings, Journal Article

In: Thin solid films
Volume: 502
Issue: 1/2
Page(s)/Article-Nr.: 235-239

Institutions

• Chair of Experimental Physics I A and I. Institute of Physics [131110]
• Department of Physics [130000]