Multi-technique characterization of tantalum oxynitride films prepared by reactive direct current magnetron sputtering

Venkataraj, Selveraj; Kittur, Harish; Drese, Robert Jens; Wuttig, Matthias

Amsterdam [u.a.] : Elsevier (2006)
Journal Article

In: Thin solid films
Volume: 514
Issue: 1/2
Page(s)/Article-Nr.: 1-9


  • Chair of Experimental Physics I A and I. Institute of Physics [131110]
  • Department of Physics [130000]