Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide

Sarakinos, Kostas; Alami, Jones; Klever, Christian; Wuttig, Matthias

Lausanne : Elsevier Sequoia (2008)
Journal Article

In: Surface & coatings technology
Volume: 202
Issue: 20
Page(s)/Article-Nr.: 5033-5035

Identifier